Reduce HTM overlay errors by 50%
Display production yield will be improved by having display photomasks produced with
Micronic Mydata Flatness Compensation™ function.
- The Flatness Compensation™ function improves the layer-layer overlay performance for
second layer alignment from specified 500 to 250 nm (M+3σ).
- The reference remains the same since only the 2nd exposure is compensated, see the
- Compensation of the placement is calculated based on the difference in mask flatness between the two loadings.
- Flatness Compensation™ function is available for Prexsion series and LRS15000 series.
For larger illustration, see PDF
For more information, contact: product manager