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Reduce HTM overlay errors by 50%

Display production yield will be improved by having display photomasks produced with
Micronic Mydata Flatness Compensation™ function.

  •  The Flatness Compensation™ function improves the layer-layer overlay performance for
    second layer alignment from specified 500 to 250 nm (M+3σ).
  • The reference remains the same since only the 2nd exposure is compensated, see the
    example below.
  • Compensation of the placement is calculated based on the difference in mask flatness between the two loadings.
  • Flatness Compensation™ function is available for Prexsion series and LRS15000 series.

For larger illustration, see PDFHTM overlay errors reduced

For more information, contact: product manager

Page last changed:  2013-02-20 | Print

Mask writers for photomask production

Micronic Mydata mask writers - one of the world's most advanced
production systems

Micronic Mydata develops, manufactures and markets laser mask writers, one of the world’s most advanced
production systems used for photomask production. Micronic Mydata has more than three decades of experience
of microlithography and photomask printing. The display mask writers are industry standard.

Grey line, d3d3d3, 0,75 pt, 770px

News
Mask writer LRS15-N for mature display photomask production

Whether it’s high-volume production or more complex pattern generation, the Micronic Mydata LRS15-N laser pattern generator is instantly adaptable to the task at hand.  

LRS15-N

 Grey line, d3d3d3, 0,75 pt, 770px

 

Display mask writers up to Generation 10

 

Semiconductor mask writers down to 22 nm

 


Mask writers for advanced electronic packaging and FPD applications

Prexision series

LRS15-N

MMS15000

FPS5500

Sigma7700

Omega6000-XT series		FPS5500

Pattern generator Prexision

Pattern generator SigmaPattern generator FPS5300