The most acccurate measurement system for photomasks and other large area two dimensional surfaces
The Micronic Mydata MMS15000 is a registration measurement system for TFT-LCD and color filter photomasks. The systems are the industry standard for display photomask metrology.
The Micronic Mydata MMS15000 is a measurement system for TFT-LCD, color filters and other
large area substrates. The systems are the industry standard for display photomask metrology.
The system is used to verify that the pattern placement and critical dimension (CD) on large area photomasks matches the high uncertainty demands of advanced displays or other large area applications. The MMS15000, based on same technology as Micronic Mydata's pattern generators, features absolute uncertainty measurement specification better than 100 nanometers and is capable of performing measurements on photomasks and other similar substrates as large as
1300 x 1500 mm.
MMS15000 product sheet